| 000 | 00509nam a2200193 a 4500 | ||
|---|---|---|---|
| 999 |
_c44040 _d44040 |
||
| 008 | 960221s1955 dcuabcdjdbkoqu001 0deng d | ||
| 020 | _a0 19 510508 7 | ||
| 041 | _aEnglish | ||
| 082 |
_a621.381 52 _bC |
||
| 100 |
_aCampbell, Stephen A _eAu |
||
| 245 | _aScience And Engineering Of Microelectronic Fabrication | ||
| 250 | _a1 | ||
| 260 |
_c1996 _aNew York _bOxford University Press |
||
| 300 | _a536 | ||
| 650 | _aEngineering | ||
| 650 | _a Microelectronics | ||
| 650 | _a Electronics | ||
| 942 | _cBK | ||